Planarcore® PVA Brush is designed to deliver superior performance and wafer-to-wafer uniformity in post CMP wafer cleaning applications.
High-Purity PVA
Molded through the core construction
Eliminates alignment and gapping problems, increasing system throughput
Close molded technology
Reduces downtime on tool
Decreases defectivity on wafer
The unique molded-through-the-core technology provides absolute adhesion of the PVA to the brush core, unlike standard PVA products that are merely friction fitted to the core.