HMDS (1,1,1,3,3,3-Hexamethyldisilazan), Halbleiter-Qualität (Honeywell 17713)
Lieferant: Honeywell Chemicals
Synonyme:
Bis(trimethylsilyl)amin
40215H-1L
HONC40215H-1LEA
538.52
EUR
HONC40215H-1L
HMDS (1,1,1,3,3,3-Hexamethyldisilazan), Halbleiter-Qualität (Honeywell 17713)
HMDS (1,1,1,3,3,3-Hexamethyldisilazan)
Formel:
(CH₃)₃SiNHSi(CH₃)₃ Molecular Weight: 161,39 g/mol |
MDL:
MFCD00008259 CAS-Nummer: 999-97-3 |
Spezifikation Testergebnisse
Assay (GC) | Min. 98 % |
Density (D 20/4) | 0.770 - 0.775 |
Refractive index (n 20/D) | 1.4070 - 1.4090 |
Non-volatile matter | Max. 5 ppm |
Aluminium (Al) | Max. 0.1 ppm |
Arsenic, antimony (as As) | Max. 0.01 ppm |
Calcium (Ca) | Max. 0.1 ppm |
Copper (Cu) | Max. 0.1 ppm |
Iron (Fe) | Max. 0.1 ppm |
Sodium (Na) | Max. 0.5 ppm |
Lead (Pb) | Max. 0.05 ppm |
Zinc (Zn) | Max. 0.1 ppm |
Chloride (Cl) | Max. 5 ppm |
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