HMDS (1,1,1,3,3,3-Hexamethyldisilazan), Halbleiter-Qualität (Honeywell 17713)

Lieferant: Honeywell Chemicals

Synonyme: Bis(trimethylsilyl)amin

40215H-1L
HONC40215H-1LEA 538.52 EUR
HONC40215H-1L
HMDS (1,1,1,3,3,3-Hexamethyldisilazan), Halbleiter-Qualität (Honeywell 17713)
HMDS (1,1,1,3,3,3-Hexamethyldisilazan)
Formel: (CH₃)₃SiNHSi(CH₃)₃
Molecular Weight: 161,39 g/mol
MDL: MFCD00008259
CAS-Nummer: 999-97-3
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Spezifikation Testergebnisse

Assay (GC) Min. 98 %
Density (D 20/4) 0.770 - 0.775
Refractive index (n 20/D) 1.4070 - 1.4090
Non-volatile matter Max. 5 ppm
Aluminium (Al) Max. 0.1 ppm
Arsenic, antimony (as As) Max. 0.01 ppm
Calcium (Ca) Max. 0.1 ppm
Copper (Cu) Max. 0.1 ppm
Iron (Fe) Max. 0.1 ppm
Sodium (Na) Max. 0.5 ppm
Lead (Pb) Max. 0.05 ppm
Zinc (Zn) Max. 0.1 ppm
Chloride (Cl) Max. 5 ppm

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